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2019-02-16 点击量:
产品特点 Product features: | |||
1.使用与美国西南研究院(SwRI)合作开发研制的新型镀膜技术-等离子体增强磁控溅射技术; Utilize a novel coating technology in cooperation with the Southwest Research Institute (SwRI)— Plasma Enhanced Magnetron Sputtering (PEMS); |
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2.更高的沉积效率,更致密的涂层,更小的表面粗糙度,涂层厚度最高可达560um; Higher deposition rate, denser structure, smoother morphology, up to 560um coating thickness; |
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3.刀具,微型刀具,模具,汽车,飞机发动机零部件涂层的理想选择; Ideal for large quantities of cutting tools, microtools, stamping, die-casting, plastic moulding, aircraft and automobile engine parts; |
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4.可对产品进行涂前氮化处理; Provide ion nitriding case hardening process before PVD coating; |
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5.可同炉沉积最多4种不同成分靶材材料; Evaporation up to 4 target materials per batch. |
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SKYVAC VacSputterTM 65 | |||
转盘直径 Swing diameter | 380mm | ||
涂层有效高度 Coatable height | 380mm | ||
最大装载量 Max. loading capacity | 100kg | ||
技术 Technology | 磁控溅射 Sputtering | ||
磁控溅射源 Sputtering sources | 4组磁控溅射源 4 sets | ||
可选技术 Technology options |
等离子体增强磁控溅射及涂前氮化处理 PEMS and nitrogen treatment |
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气体 Gas modules | Ar, N2, H2, C2H2, O2, He | ||
最大加热温度 Max. heating temperature | 500℃ |
设备尺寸 Dimensions | |
长 Length | 2820mm |
宽 Width | 1410mm |
高 Height | 2356mm |
占地面积 Footprint | 4m2 |
重量 Weight | 3360kg |